{"title":"ECR等离子体的傅里叶变换质谱分析","authors":"J. Shohet, J. Friedmann, A. Wendt, J. Brenna","doi":"10.1109/PLASMA.1989.166244","DOIUrl":null,"url":null,"abstract":"Consideration has been given to the use of Fourier transform mass spectrometry (FTMS) to provide in-situ mass measurements of active species in an electron cyclotron resonance (ECR) plasma reactor. An ECR plasma was produced in a vacuum chamber placed inside a DC magnetic mirror field by microwaves whose power level could be adjusted up to 2 kW CW. The electron cyclotron resonance was adjusted to be approximately 25% of the distance from the throat of the mirror to the mid-plane of the vacuum chamber. The mirror ratio was 2:1, the operating gas was argon, and the pressure was set to 2*10/sup -4/ torr. FTMS took place in a cubical cell placed in the center of the magnetic mirror region where the magnetic field was most uniform.<<ETX>>","PeriodicalId":165717,"journal":{"name":"IEEE 1989 International Conference on Plasma Science","volume":"10 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1989-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Fourier transform mass spectrometry in an ECR plasma\",\"authors\":\"J. Shohet, J. Friedmann, A. Wendt, J. Brenna\",\"doi\":\"10.1109/PLASMA.1989.166244\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Consideration has been given to the use of Fourier transform mass spectrometry (FTMS) to provide in-situ mass measurements of active species in an electron cyclotron resonance (ECR) plasma reactor. An ECR plasma was produced in a vacuum chamber placed inside a DC magnetic mirror field by microwaves whose power level could be adjusted up to 2 kW CW. The electron cyclotron resonance was adjusted to be approximately 25% of the distance from the throat of the mirror to the mid-plane of the vacuum chamber. The mirror ratio was 2:1, the operating gas was argon, and the pressure was set to 2*10/sup -4/ torr. FTMS took place in a cubical cell placed in the center of the magnetic mirror region where the magnetic field was most uniform.<<ETX>>\",\"PeriodicalId\":165717,\"journal\":{\"name\":\"IEEE 1989 International Conference on Plasma Science\",\"volume\":\"10 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1989-05-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE 1989 International Conference on Plasma Science\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/PLASMA.1989.166244\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE 1989 International Conference on Plasma Science","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PLASMA.1989.166244","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fourier transform mass spectrometry in an ECR plasma
Consideration has been given to the use of Fourier transform mass spectrometry (FTMS) to provide in-situ mass measurements of active species in an electron cyclotron resonance (ECR) plasma reactor. An ECR plasma was produced in a vacuum chamber placed inside a DC magnetic mirror field by microwaves whose power level could be adjusted up to 2 kW CW. The electron cyclotron resonance was adjusted to be approximately 25% of the distance from the throat of the mirror to the mid-plane of the vacuum chamber. The mirror ratio was 2:1, the operating gas was argon, and the pressure was set to 2*10/sup -4/ torr. FTMS took place in a cubical cell placed in the center of the magnetic mirror region where the magnetic field was most uniform.<>
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