基于进化计算和开环频率响应的MEMS器件调谐

2005 IEEE Aerospace Conference Pub Date : 2005-03-05 DOI:10.1109/AERO.2005.1559562

D. Keymeulen, Wolfgang Fink, M. I. Ferguson, C. Peay, R. Terrile, K. Yee

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引用次数: 19

摘要

我们提出了一种基于进化计算的MEMS陀螺仪调谐方法，该方法能够通过调谐有效地提高MEMS陀螺仪的灵敏度，并且能够找到灵敏度增加状态下的最佳调谐结构。通过对第二代喷气推进实验室/波音后腔MEMS陀螺仪的开环工作频率响应测量，对该调谐方法进行了测试

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Tuning of MEMS devices using Evolutionary Computation and Open-Loop Frequency Response

We propose a tuning method for MEMS gyroscopes based on evolutionary computation that has the capacity to efficiently increase the sensitivity of MEMS gyroscopes through tuning and, furthermore, to find the optimally tuned configuration for this state of increased sensitivity. The tuning method was tested for the second generation JPL/Boeing Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation

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来源期刊

2005 IEEE Aerospace Conference

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