一种无掩模光刻系统的无损电路布局图像压缩算法

Jeehong Yang, S. Savari
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引用次数: 9

摘要

我们介绍了一种基于变换的技术来表示电路布局图像,因此,1)它通常比该应用的最先进的压缩方案Block C4在无掩模光刻系统中具有更好的压缩比,2)它允许比Block C4更快的编码和更简单的解码,同时3)它需要类似数量的内存进行解码。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A Lossless Circuit Layout Image Compression Algorithm for Maskless Lithography Systems
We introduce a transform-based technique to represent a circuit layout image so that 1) it typically leads to better compression ratios for maskless lithography systems than Block C4, the state-of-the-art compression scheme for this application, and 2) it permits faster encoding and less complex decoding than Block C4, while 3) it requires a similar amount of memory for decoding.
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