{"title":"MEMS用PZT厚膜","authors":"S. Gebhardt, U. Partsch, A. Schonecker","doi":"10.1109/ISAF.2008.4693830","DOIUrl":null,"url":null,"abstract":"Al2O3, silicon and low temperature cofired ceramics (LTCC) are key functional materials, forming the substrate basis in microsystems technologies. They allow for three dimensional component integration, high robustness and excellent reliability. The combination of these substrate materials with piezoelectric films offer advanced sensor, actuator and ultrasonic transducer solutions which open up new fields of applications. We developed a PZT thick film paste with excellent dielectric and electromechanical properties. In combination with special electrode and barrier layers a technology was achieved allowing for the development of custom products.","PeriodicalId":228914,"journal":{"name":"2008 17th IEEE International Symposium on the Applications of Ferroelectrics","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-12-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"PZT thick films for MEMS\",\"authors\":\"S. Gebhardt, U. Partsch, A. Schonecker\",\"doi\":\"10.1109/ISAF.2008.4693830\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Al2O3, silicon and low temperature cofired ceramics (LTCC) are key functional materials, forming the substrate basis in microsystems technologies. They allow for three dimensional component integration, high robustness and excellent reliability. The combination of these substrate materials with piezoelectric films offer advanced sensor, actuator and ultrasonic transducer solutions which open up new fields of applications. We developed a PZT thick film paste with excellent dielectric and electromechanical properties. In combination with special electrode and barrier layers a technology was achieved allowing for the development of custom products.\",\"PeriodicalId\":228914,\"journal\":{\"name\":\"2008 17th IEEE International Symposium on the Applications of Ferroelectrics\",\"volume\":\"5 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-12-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 17th IEEE International Symposium on the Applications of Ferroelectrics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISAF.2008.4693830\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 17th IEEE International Symposium on the Applications of Ferroelectrics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISAF.2008.4693830","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Al2O3, silicon and low temperature cofired ceramics (LTCC) are key functional materials, forming the substrate basis in microsystems technologies. They allow for three dimensional component integration, high robustness and excellent reliability. The combination of these substrate materials with piezoelectric films offer advanced sensor, actuator and ultrasonic transducer solutions which open up new fields of applications. We developed a PZT thick film paste with excellent dielectric and electromechanical properties. In combination with special electrode and barrier layers a technology was achieved allowing for the development of custom products.
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