单壁碳纳米管和多壁碳纳米管32nm片上互连性能分析

P. Murugeswari, A. P. Kabilan, M. Vaishnavi, C. Divya
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引用次数: 5

摘要

当集成电路缩小到32纳米以下时,半导体行业在互连部分面临着一个关键问题。缩放增加了每单位面积的器件数量,这反过来又提高了晶体管的性能,从而提高了每单位面积的整体性能。但是互连的性能有所下降,特别是全局互连的性能有所下降。铜互连线的截面积按工艺尺度缩小,由于尺寸效应,电阻率增大。电阻率的增加会影响铜互连的性能,即延迟和载流能力。由于碳纳米管具有较高的平均自由程和弹道输运特性,因此被提出作为铜的替代品来缓解各级互连中的瓶颈。对单壁碳纳米管和多壁碳纳米管互连延迟性能进行了评价,并与铜互连延迟性能进行了比较。利用HSPICE的传输线模型,对碳纳米管和铜互连线进行了全面的研究。比较表明,MWCNT是最有希望用于局部、中间和全局互连的候选材料。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Performance analysis of single-walled carbon nanotube and multi-walled carbon nanotube in 32nm technology for on-chip interconnect applications
The semiconductor industry is facing a crucial problem in the interconnect section when IC is scaled down below 32 nm technology. Scaling increases the number of devices per unit area, which in turn increases the performance of the transistor resulting in the overall increase of performance per unit area. But there is a decrease in the performance of interconnect especially in that of global interconnect. The reduction in the cross section of copper interconnects in accordance with technology scaling, increases the resistivity due to size effects. This increase in resistivity affects performance, namely delay and current carrying capability of copper interconnect. Carbon nanotube is proposed as the replacement for copper to alleviate the bottleneck in all levels of interconnects because it has high mean free path and ballistic transport. The performance evaluation of both single-walled carbon nanotube and multi-walled carbon nanotube interconnect delay is carried out and the results are compared with that of the copper interconnects. Both the CNTs and copper interconnects are examined thoroughly with the help of HSPICE simulation using its transmission line model. Comparison shows that MWCNT is the most promising candidate for local, intermediate and global levels of interconnects.
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