柔性关节光伺服扫描平台的控制设计

Y. Yeh, J. Yen, Yung-Hao Peng, Jyh-Fa Lee
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引用次数: 0

摘要

高分辨率、高精度伺服机构在微纳米光学领域发挥着重要作用。它的应用包括投影系统、头戴式显示器、扫描仪、摄像头、热跟踪系统等。伺服机构常用于提高光学分辨率,通过驱动扫描镜达到远远超过传统光学系统的位置分辨率。这些伺服机构通常需要在保持极高定位精度的同时实现高运行速度。为了实现这一目标,本文介绍了一种新型的、高速、高精度的光学扫描平台伺服机构。所提出的设计采用带有柔性接头的压电换能器(PZT)。柔性关节的使用不仅消除了间隙,实现平滑和连续的位移,还减少了摩擦,消除了润滑的需要。为了了解该平台的基本动力学特性,本文利用ANSYS软件对该机构的所有理想物理性能进行了有限元分析。采用有限元分析方法对控制系统的动态行为进行了仿真。根据仿真结果,构造了一种改进的控制器,以获得更好的扫描分辨率。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Design for control of a flexure jointed optical servo scanning platform
High resolution and precision servo mechanism has played an important role in micro and nano optics. Its application includes projection systems, head-mount displays, scanners, cameras, heat tracking systems and so on... The servo mechanisms are often used to enhance the optical resolution by driving the scanning mirrors to reach position resolution far beyond the conventional optical systems. It is often necessary for these servo mechanisms to achieve high operation speeds while maintaining extreme positioning accuracy. To achieve this goal, this paper introduces a novel, high speed, high precision servo mechanism for an optical scanning platform. The proposed design uses piezoelectric transducers (PZT) with flexure joints. The use of the flexure joints not only eliminates backlash to achieve smooth and continuous displacement but also reduces friction to eradicate the need for lubrication. In order to understand the basic dynamics of the platform, this paper uses ANSYS for the finite element analysis (FEA) of all the desirable physical properties of the mechanism. The FEA analysis is also used for simulating the dynamic behavior of the control system. Based on the simulation results an improved controller is constructed for better scanning resolutions.
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