{"title":"S0谐振器中加权电极与传统电极结构的比较","authors":"Ynshuai Liu, Tao Wu","doi":"10.1109/IUS54386.2022.9957329","DOIUrl":null,"url":null,"abstract":"The paper reports on electromechanical coupling (k<inf>t</inf><sup>2</sup>) enhancement technique for LiNbO<inf>3</inf>-based laterally vibrating resonators (LVRs). It demonstrates the design and analysis of symmetric (S0) resonators with the weighted structure of 36Y-cut Lithium Niobate (LiNbO<inf>3</inf>) thin film. This structure can enable the effective exciting of fundamental S0 mode. The resonator orientated 40° to +y in the 36Y-cut plane can achieve high electromechanical coupling coefficient (k<inf>t</inf><sup>2</sup>) of 26.2% in S0 mode. Such a high coupling coefficient enables a large bandwidth of acoustic-based RF filters.","PeriodicalId":272387,"journal":{"name":"2022 IEEE International Ultrasonics Symposium (IUS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-10-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Comparison of Weighted And Traditional Electrode Configurations In S0 Resonators\",\"authors\":\"Ynshuai Liu, Tao Wu\",\"doi\":\"10.1109/IUS54386.2022.9957329\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The paper reports on electromechanical coupling (k<inf>t</inf><sup>2</sup>) enhancement technique for LiNbO<inf>3</inf>-based laterally vibrating resonators (LVRs). It demonstrates the design and analysis of symmetric (S0) resonators with the weighted structure of 36Y-cut Lithium Niobate (LiNbO<inf>3</inf>) thin film. This structure can enable the effective exciting of fundamental S0 mode. The resonator orientated 40° to +y in the 36Y-cut plane can achieve high electromechanical coupling coefficient (k<inf>t</inf><sup>2</sup>) of 26.2% in S0 mode. Such a high coupling coefficient enables a large bandwidth of acoustic-based RF filters.\",\"PeriodicalId\":272387,\"journal\":{\"name\":\"2022 IEEE International Ultrasonics Symposium (IUS)\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-10-10\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2022 IEEE International Ultrasonics Symposium (IUS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IUS54386.2022.9957329\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE International Ultrasonics Symposium (IUS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IUS54386.2022.9957329","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Comparison of Weighted And Traditional Electrode Configurations In S0 Resonators
The paper reports on electromechanical coupling (kt2) enhancement technique for LiNbO3-based laterally vibrating resonators (LVRs). It demonstrates the design and analysis of symmetric (S0) resonators with the weighted structure of 36Y-cut Lithium Niobate (LiNbO3) thin film. This structure can enable the effective exciting of fundamental S0 mode. The resonator orientated 40° to +y in the 36Y-cut plane can achieve high electromechanical coupling coefficient (kt2) of 26.2% in S0 mode. Such a high coupling coefficient enables a large bandwidth of acoustic-based RF filters.
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