A Solver for Devices of Subwavelength Lamellar Gratings

A solver for subwavelength lamellar gratings is presented synchronized with the development of a light modulator for holographic video display Grating Liquid Crystal on Silicon (GLCoS) and is regarded as an important part of the whole R&D work. In this way it not only gives computational support in the whole design process including physical concept descriptions, verifications, predictions, fabrications and other experimental activities but also provides a support platform for further product development. Based on the generic Fourier modal method, we focus on the electrodynamics specific to conductors (Au, Al) and charge carriers in semiconductors (Indium Tin Oxide, ITO) in SPPs (Surface Plasmon Polaritons) and permittivity characteristics of the materials to make the solver oriented towards subwavelength (metal, semiconductor) lamellar gratings. Further, we analyze and calculate the optical characteristics of subwavelength lamellar gratings composed of ITO and Au. The results of these calculations not only agree with the results of actual GLCoS device tests to the same order of accuracy, but also demonstrate the validity and accuracy of the solver.