一种用于表面污染检测的超灵敏激光微探针

Laser Applications to Chemical Analysis Pub Date : 1900-01-01 DOI:10.1364/laca.1992.thb5

M. Duignan, C. Christensen

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引用次数: 0

摘要

越来越多的现代工业过程要求严格控制基材表面污染物的潜在干扰。直接检测如此少量的污染是一项具有挑战性的技术任务，特别是如果要在难以进入的地区进行检测。我们报道了一种新的基于激光的检测部件表面非挥发性残留物的方法。

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An Ultrasensitive Laser Microprobe for Detection of Surface Contamination

Increasingly, modem industrial processes demand strict control of potential interferences from contaminants on substrate surfaces. Direct detection of such small amounts of contamination presents a challenging technical task, particularly if detection is to be carried out in areas that are difficult to access. We report on a new laser-based detection method for nonvolatile residue on component surfaces.

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Laser Applications to Chemical Analysis

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