用于x射线探测的高电阻硅光电二极管阵列

2013 IEEE International Instrumentation and Measurement Technology Conference (I2MTC) Pub Date : 2013-05-06 DOI:10.1109/I2MTC.2013.6555569

Steve Ross, M. Haji-Sheikh, G. Westberg

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引用次数: 2

摘要

介绍了一种用于阿贡国家实验室先进光子源x射线同步加速器的硅多像素x射线探测器的构建方法。这些探测器是使用重掺杂氧化物源构建的PIN二极管。所选择的施工方法有助于减少背景漏电流，并允许最少的工艺步骤。我们讨论了传感器特性的测试结果。

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High-resistivity silicon photodiode arrays for x-ray detection

Presented is a method to build silicon multi-pixel x-ray detectors for use on the Argonne National Laboratory's Advanced Photon Source x-ray synchrotron. These detectors are PIN diodes constructed using heavily doped oxide sources. The construction method chosen helps reduce the background leakage current and allows for a minimum of process steps. We discuss test results of the characterization of the sensors.

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2013 IEEE International Instrumentation and Measurement Technology Conference (I2MTC)

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