为快速、简单地评估高注入区域载流子机动性而设计的测试结构

ICMTS 1999. Proceedings of 1999 International Conference on Microelectronic Test Structures (Cat. No.99CH36307) Pub Date : 1999-03-15 DOI:10.1109/ICMTS.1999.766224

G. Persiano

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引用次数: 0

摘要

本文描述了一个微电子测试结构的使用和设计，以展示一种新的快速和简单的直流方法来测量载流子迁移率随载流子浓度的依赖性。测试结构旨在减少寄生效应，并提供可靠的结果，直至最高载流子浓度。通过数值仿真验证了该方法对若干试验结构参数的准确性。给出了实验结果，并用一个简单的拟合公式表示。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Test structure design for a fast and simple evaluation of carrier mobilities in highly injected regions

This paper describes the use and the design of a microelectronic test structure to show a new fast and simple DC method for measuring the dependence of carrier mobilities upon carrier concentration. The test structure is designed for reducing parasitic effects and providing reliable results up to the highest carrier concentrations. Numerical simulation is used for verification of the accuracy of the method for several test structure parameters. Experimental results are provided and represented by a simple fitting formula.

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ICMTS 1999. Proceedings of 1999 International Conference on Microelectronic Test Structures (Cat. No.99CH36307)

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