金属薄膜在130GHz下的片电阻测量

2003 33rd European Microwave Conference, 2003 Pub Date : 2003-10-01 DOI:10.1109/EUMA.2003.340992

M-H. J. Lee, R. Collier

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引用次数: 0

摘要

利用130 GHz的传输技术测量了金属薄膜的片电阻。该技术可用于从几千欧姆到几欧姆的各种薄片电阻。微波测量结果高于0 Hz时的测量值。对于小于几欧姆的薄片电阻，使用图案金属薄膜的测量范围向下扩展。

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Measurement of the sheet resistance of thin metallic films at 130GHz

The sheet resistance of thin metallic films has been measured using a transmission technique at 130 GHz. This technique can be used for a range of sheet resistances from a few kilohms down to a few ohms. The microwave results are higher than the corresponding values measured at 0 Hz. For sheet resistances less than a few ohms, the measurement range has been extended downwards using patterned metallic films.

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2003 33rd European Microwave Conference, 2003

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