扫描声力显微镜研究纵向泄漏表面声波

1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027) Pub Date : 1999-10-17 DOI:10.1109/ULTSYM.1999.849379

G. Behme, E. Chilla, H.-J. Frohlich

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引用次数: 1

摘要

我们首次采用扫描声力显微镜(SAFM)对石英和钽酸锂衬底以及分层系统上的准纵向极化声波进行了测量。对微观区域的声相速度进行了测量，结果与数值计算结果吻合较好。讨论了高速伪saw (HVPSAW)侵彻深度对SAFM信号形成的影响。

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Investigation of longitudinal leaky surface acoustic waves by scanning acoustic force microscopy

We present first measurements on acoustic waves with quasi longitudinal polarization on quartz and lithium tantalate substrates as well as layered systems carried out by a scanning acoustic force microscope (SAFM). Acoustic phase velocities were measured for microscopic areas showing a good agreement with numerical calculations. The influence of the penetration depth of the high velocity pseudo SAWs (HVPSAW) on the SAFM signal formation is discussed.

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来源期刊

1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027)

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