纳米结构铜的低周疲劳裂纹扩展

S. Koh, A. Saxena, W. V. van Driel, G.Q. Zhang, R. Tummala
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引用次数: 2

摘要

ITRS预测,到2018年,集成芯片(IC)封装的I/O间距将达到90纳米。在倒装芯片技术中,铅基焊料材料将无法满足这些细间距的热机械要求。在所有已知的互连技术中,纳米结构互连如纳米晶铜是最有前途的技术,以满足下一代设备的高机械可靠性和电气要求。然而,有必要充分表征其疲劳性能。在本研究中,采用数值分析方法研究了纳米结构互连在单轴疲劳载荷作用下的半椭圆裂纹扩展和形态演化。结果表明,纳米晶铜实际上是超细间距互连应用的合适候选材料。该研究还预测,在LCF条件下,裂纹扩展在互连体总疲劳寿命中所占的比例相对较小。因此,裂纹起裂寿命是决定连接件疲劳寿命的主要因素。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Low cycle fatigue crack growth in nanostructure copper
ITRS has predicted that integrated chip (IC) packages will have interconnections with I/O pitch of 90 nm by the year 2018. Lead-based solder materials in flip chip technology will not be able to satisfy the thermal mechanical requirement these fine pitches. Of all the known interconnect technologies, nanostructure interconnects such as nanocrystalline Cu are the most promising technology to meet the high mechanical reliability and electrical requirements of next generation devices. However, there is a need to fully characterize their fatigue properties. In this research, numerical analysis has been employed to study the semi-elliptical crack growth and shape evolution in nanostructured interconnects subject to uniaxial fatigue loading. The results indicate that nanocrystalline copper is in fact a suitable candidate for ultra-fine pitch interconnects applications. This study also predicts that crack growth is a relatively small portion of the total fatigue life of interconnects under LCF conditions. Hence, crack initiation life is the main factor in determining the fatigue life of interconnects.
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