一种基于显微镜视觉的多层R2R印刷电子器件主动寄存器控制策略

Lele Hu, Weihai Chen, Wenjie Chen, Zhong Liu
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引用次数: 1

摘要

在R2R工艺中,多层排列是影响印刷电子产品性能的决定性因素。提出了一种实现层间高精度配准的主动配准控制策略。该方法采用高分辨率显微镜相机测量配准误差。由于显微镜相机的视场很小,用传统的方法很难校准该相机。为此,首先提出了一种利用打印头相对微运动的运动标定方法。该配准控制策略通过五自由度柔性对准级对喷管在XOY平面上的轨迹进行微调。实验验证了标定方法和设计的控制策略,结果表明,标定准确,最终实现了显微镜相机的高分辨率配准。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
An active register control strategy for multilayer R2R printed electronics based on microscope vision
Multilayer alignment is the decisive factor that influences performance of printed electronics in R2R process. This paper presents an active register control strategy to achieve high-precision registration between layers. A high resolution microscope camera is used to measure registration error in proposed strategy. Due to the small view field of the microscope camera, it's difficult to calibrate this camera by conventional methods. Therefore, a motion-based calibration method which utilizes relative micromovement of print header is proposed firstly. This register control strategy fine-tunes the trajectory of nozzle in XOY plane by five degree of freedom compliant alignment stage. The calibration method and designed control strategy are verified in experiment and results indicate that the microscope camera is calibrated accurately and high resolution registration is ultimately realized.
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