MEMS惯性结构机械变形引起的电容偏差

2020 27th International Conference on Mixed Design of Integrated Circuits and System (MIXDES) Pub Date : 2020-06-01 DOI:10.23919/MIXDES49814.2020.9155774

J. Nazdrowicz, A. Stawinski, A. Napieralski

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引用次数: 0

摘要

作者提出了MEMS传感器中电容结构估计的一个重要问题。其重要性在于，在工作过程中，惯性传感器在外力的影响下会发生变形。这个问题的结果在电容偏差中是可见的，而在精度传感器测量中可以直接看到。

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Capacitance Deviation Caused by Mechanical Deformation of MEMS Inertial Structure

Authors presents a very important problem of estimation capacitance structures used in MEMS sensors. The importance comes from the fact that during operation, inertial sensors deform under influence of external forces. The result of the problem is visible in capacitance deviations what directly may be seen in accuracy sensor measurement.

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2020 27th International Conference on Mixed Design of Integrated Circuits and System (MIXDES)

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