基于移动聚合物波导和自锁存结构的光开关

Int. J. Comput. Eng. Sci. Pub Date : 2003-09-01 DOI:10.1142/S1465876303001496

H. B. Liu, F. Chollet

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引用次数: 3

摘要

本文介绍了一种新型的光开关，称为自锁存光波导MEMS开关。smams是基于一种新型的微机械双稳自锁存结构，该结构是在SOI(绝缘体上硅)晶圆上制造的，上面有35μm的硅层，并附着聚合物波导。与现有的移动波导开关相比，SWOMS具有消除间隙和自锁存等独特的特性。本文将介绍SWOMS的结构、原理和制作方法。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Optical Switch Based On Moving Polymer Waveguides And Self-Latching Structure

This paper describes a new type of optical switch, named as SWOMS (Self-latching Waveguides Optical MEMS Switch). The SWOMS is based on a novel micromachined bistable self-latching structure, which is fabricated on a SOI (silicon-on-insulator) wafer with a 35μm top silicon layer, and with polymer waveguides attached on it. Comparing to existing moving waveguide switches, SWOMS has some unique promising features such as gap-elimination and self-latching. Here, the structure, principle, and fabrication of SWOMS will be introduced.

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Int. J. Comput. Eng. Sci.

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