毛细管力自组装微纳米加工的机理及应用

Shuhua Wei, Minglong Qin, Jing Zhang
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引用次数: 2

摘要

近年来,自组装技术作为一种有效的微纳米结构制造技术受到了越来越多的关注。毛细管力作为一种重要的自组装驱动力,已经成为一种通用的、可扩展的方法,可以在微/纳米尺度上构建复杂的几何形状。为了充分利用毛细管力制造特定的微纳器件,我们对毛细管力自组装的机理进行了深入的研究,并分析了自组装过程中微纳结构受到的影响因素。在应用方面,我们对主要的组装方法、可获得的微纳结构及其潜在应用进行了分类。最后,我们指出毛细管力自组装由于其可调性和简单性在微纳米制造中具有广泛的应用前景。同时,提出了在进一步研究中需要解决的问题。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Mechanism and application of capillary-force self-assembly micro/nanofabrication
Self-assembly has attracted increasing attention as an effective strategy for fabrication of functional micro/nanostructures in recent years. Capillary-force as a significant driving force of self-assembly has become a versatile and scalable approach to build complex geometries at the micro/nanoscales. In order to take full advantage of capillary-force to fabricate specific micro/nanoscales devices, we have done a thorough research on the mechanism of capillary-force self-assembly and analyzed the impact factors of micro/nanostructures suffered during the self-assembly process. In the aspect of application, we classified the main assembly methods, micro/nanostructures which can be got and their potential applications. Finally, we indicated that capillary-force self-assembly would have broad utilization in micro/nanofabrication due to its tunability and simplicity. Meanwhile, we put forward some issues that need to be solved in the further research.
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