{"title":"毛细管力自组装微纳米加工的机理及应用","authors":"Shuhua Wei, Minglong Qin, Jing Zhang","doi":"10.1109/3M-NANO.2016.7824940","DOIUrl":null,"url":null,"abstract":"Self-assembly has attracted increasing attention as an effective strategy for fabrication of functional micro/nanostructures in recent years. Capillary-force as a significant driving force of self-assembly has become a versatile and scalable approach to build complex geometries at the micro/nanoscales. In order to take full advantage of capillary-force to fabricate specific micro/nanoscales devices, we have done a thorough research on the mechanism of capillary-force self-assembly and analyzed the impact factors of micro/nanostructures suffered during the self-assembly process. In the aspect of application, we classified the main assembly methods, micro/nanostructures which can be got and their potential applications. Finally, we indicated that capillary-force self-assembly would have broad utilization in micro/nanofabrication due to its tunability and simplicity. Meanwhile, we put forward some issues that need to be solved in the further research.","PeriodicalId":273846,"journal":{"name":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Mechanism and application of capillary-force self-assembly micro/nanofabrication\",\"authors\":\"Shuhua Wei, Minglong Qin, Jing Zhang\",\"doi\":\"10.1109/3M-NANO.2016.7824940\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Self-assembly has attracted increasing attention as an effective strategy for fabrication of functional micro/nanostructures in recent years. Capillary-force as a significant driving force of self-assembly has become a versatile and scalable approach to build complex geometries at the micro/nanoscales. In order to take full advantage of capillary-force to fabricate specific micro/nanoscales devices, we have done a thorough research on the mechanism of capillary-force self-assembly and analyzed the impact factors of micro/nanostructures suffered during the self-assembly process. In the aspect of application, we classified the main assembly methods, micro/nanostructures which can be got and their potential applications. Finally, we indicated that capillary-force self-assembly would have broad utilization in micro/nanofabrication due to its tunability and simplicity. Meanwhile, we put forward some issues that need to be solved in the further research.\",\"PeriodicalId\":273846,\"journal\":{\"name\":\"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)\",\"volume\":\"34 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/3M-NANO.2016.7824940\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/3M-NANO.2016.7824940","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Mechanism and application of capillary-force self-assembly micro/nanofabrication
Self-assembly has attracted increasing attention as an effective strategy for fabrication of functional micro/nanostructures in recent years. Capillary-force as a significant driving force of self-assembly has become a versatile and scalable approach to build complex geometries at the micro/nanoscales. In order to take full advantage of capillary-force to fabricate specific micro/nanoscales devices, we have done a thorough research on the mechanism of capillary-force self-assembly and analyzed the impact factors of micro/nanostructures suffered during the self-assembly process. In the aspect of application, we classified the main assembly methods, micro/nanostructures which can be got and their potential applications. Finally, we indicated that capillary-force self-assembly would have broad utilization in micro/nanofabrication due to its tunability and simplicity. Meanwhile, we put forward some issues that need to be solved in the further research.