用于环境、物质、材料和产品电子显微镜监测方法的新型场发射阴极原型的研究

2020 IEEE International Conference on Electrical Engineering and Photonics (EExPolytech) Pub Date : 2020-10-15 DOI:10.1109/EExPolytech50912.2020.9243983

R. Smerdov, Y. Spivak, I. Bizyaev

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引用次数: 1

摘要

简要介绍了提高电子显微镜方法空间分辨率的可能方法。采用两阶段法合成了碳基纳米结构层功能化多孔硅基复合发射材料。利用扫描电子显微镜对样品表面进行了研究。对材料的发射特性进行了测量和分析;计算了有效势垒高度。

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The Investigation of a Novel Field Emission Cathode Prototype for Electron Microscopy Methods of Monitoring the Environment, Substances, Materials and Products

A brief introduction into the possible approach for enhancing the spatial resolution of electron microscopy methods is provided. The synthesis of the composite emissive material based on porous silicon functionalized with carbon-based nanostructured layer is performed via a two-stage technique. The surface of the prototype is investigated via the means of scanning electron microscopy. Emission characteristics of the material are measured and analyzed; effective potential barrier height is calculated.

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2020 IEEE International Conference on Electrical Engineering and Photonics (EExPolytech)

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