具有大制造公差的低相位误差硅90°光学杂化

2023 IEEE Silicon Photonics Conference (SiPhotonics) Pub Date : 2023-04-01 DOI:10.1109/SiPhotonics55903.2023.10141928

A. Oka, Jianping Wang, Yoshihiko Yoshida, A. Uetake, Akira Ishii, S. Akiyama

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引用次数: 0

摘要

提出了一种具有较大相位误差制造公差的新型硅90°光学杂化结构。在1.525 ~ 1.57µm波长范围内，相位误差< 5°的产率高达99.94%。

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Low-Phase-Error Silicon 90° Optical Hybrid with Large Fabrication Tolerance

A novel silicon 90° optical hybrid with large fabrication tolerance for the phase error is demonstrated. A high yield of 99.94% for| phase error| < 5° in the wavelength range of 1.525 - 1.57µm is achieved by using two fabricated wafers.

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2023 IEEE Silicon Photonics Conference (SiPhotonics)

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