带波导集成探测器的单片中红外甲烷气体传感器

2021 IEEE Photonics Society Summer Topicals Meeting Series (SUM) Pub Date : 2021-07-01 DOI:10.1109/SUM48717.2021.9505931

P. Su, K. Stoll, Z. Han, D. Kita, P. Becla, H. Lin, S. Deckoff-Jones, K. Richardson, L. C. Kimerling, J. Hu, A. Agarwal

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引用次数: 0

摘要

我们展示了一种集成了PbTe光导体探测器的单片硫族玻璃螺旋波导传感器，用于中红外吸收光谱传感。目前的甲烷气体传感检测极限实验测量为1%的体积，但进一步优化应最大灵敏度为330 ppmv。

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Monolithic Mid-IR Methane Gas Sensor with Waveguide-Integrated Detector

We demonstrate a monolithic chalcogenide glass spiral waveguide sensor integrated with a PbTe photoconductor detector on-chip for mid-infrared absorption spectroscopic sensing. Current methane gas sensing limit of detection was experimentally measured as 1% by volume, but further optimization should maximize sensitivity to 330 ppmv.

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2021 IEEE Photonics Society Summer Topicals Meeting Series (SUM)

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