图案几何形状对激光修整膜电阻器影响的研究

Maria Alafogianni, M. Birkett, R. Penlington
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引用次数: 2

摘要

本文研究了不同修整方式对激光修整膜电阻器性能的影响。对各种流行的装饰图案几何形状(包括倾切和l形切割)进行了建模和测试,并研究了它们对电阻值、电阻温度系数(TCR)和热影响区(HAZ)灵敏度的影响。结果表明,在微调算法中,电阻尺寸和微调长度的变化可以提高电阻的TCR,对于插入式切割,其结果为100-140 ppm/°C,对于l型切割,其结果为100-130 ppm/°C。还发现,在相同的电阻尺寸下,l型切割在热影响区内的灵敏度为11%,而骤降切割的灵敏度为12%。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
An investigation into the effects of pattern geometries on laser trimmed film resistors
This study investigates the influence of different trim patterns on the performance of laser trimmed film resistors. A variety of popular trim pattern geometries including the plunge and L-cut were modelled and tested and their effect on resistance value, temperature coefficient of resistance (TCR) and heat-affected-zone (HAZ) sensitivity was investigated. It is shown that variation in resistor dimensions and trim length in the trimming algorithm can increase the TCR of the resistors with results of 100-140 ppm/°C for the plunge cut and 100-130 ppm/°C for the L-cut. It is also found that the L-cut has lower sensitivity in the HAZ with a value of 11% in comparison with the plunge cut with a value of 12% for the same resistor dimensions.
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