用陶瓷和金属粉末混合制成的加热阴极进行扩散真空电弧放电

R. Usmanov, A. Melnikov, V. Polistchook, S. Vetrova
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摘要

本文介绍了陶瓷和金属粉末混合加热阴极真空电弧放电等离子体流动参数的实验研究结果。放电以阴极电流附着的扩散模式存在。扩散模式的特点是阴极电流密度相对较低(10-100 A/ cm2),没有明显的电压振荡,等离子体形成时发光稳定。用飞行时间质谱法测量了电弧等离子体的平均电荷通量、离子能量和离子组成。结果表明,铬是等离子体形成介质的主要来源,而二氧化铈是热离子发射电子的主要来源。所得结果可用于设计多组分凝聚物质的稳定等离子体源,用于复合涂层的沉积和等离子体质量分离等广泛应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Diffuse vacuum arc discharge with heated cathode made of mixture of ceramic and metal powders
The paper present results of an experimental study of a plasma flow parameters generated by a vacuum arc discharge with heated cathode made of mixture of ceramic and metal powders. The discharge existed in a diffuse mode of cathode current attachment. The diffuse mode was characterized by relatively low values of cathode current density (10–100 A/cm 2 ), absence of significant voltage oscillations and stable glow of plasma formation. The data on mean charge of the arc plasma flux, ion energies and ion composition measured by time-of-flight mass spectroscopy method were obtained. It was shown that chromium is a main source of the plasma forming medium when cerium dioxide is a main source of electrons of thermionic emission. Obtained results can be useful in designing of stable plasma sources of multi-component condensed substances for wide range of applications from deposition of composite coatings to plasma mass separation.
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