深亚微米SOI mosfet中随时间降解规律的测定

S. Renn, J. Pelloie, F. Balestra
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引用次数: 2

摘要

深入研究了深亚微米Nand p沟道SOI MOSFET中的热载子效应。在较长的应力时间内,可以观察到相对于初始功率时变规律的饱和现象。本文提出并比较了饱和状态下的各种寿命预测方法。为了获得10年的寿命,最大漏极偏置的栅极长度依赖性也通过这些不同的外推技术得到了解决。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
On the determination of the time-dependent degradation laws in deep submicron SOI MOSFETs
Hot-carrier effects are thoroughly investigated in deep submicron Nand P-channel SOI MOSFET. A saturation phenomenon relative to the initial power time-dependent law can be observed for long stress time. In this paper, various lifetime prediction methods in the saturation regime are proposed and compared. The gate length dependence of the maximal drain biases in order to obtain a 10 years lifetime is also addressed with these various extrapolation techniques.
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