超声频率下的原子力显微镜

1994 Proceedings of IEEE Ultrasonics Symposium Pub Date : 2002-06-07 DOI:10.1117/12.469631

U. Rabe, W. Arnold

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引用次数: 15

摘要

提出了一种原子力显微镜(AFM)与声学显微镜相结合的新型近场声学显微镜。横向分辨率由探针直径而不是声波波长决定，在平面样品上可以达到原子尺度。研究了AFM悬臂梁的超声振动以及AFM尖端与样品表面的非线性相互作用。用新技术拍摄的超声图像显示

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Atomic force microscopy at ultrasonic frequencies

We present a new type of near-field Acoustic Microscopy combining Atomic Force Microscopy (AFM) and Acoustic Microscopy. The lateral resolution is given by the probe diameter instead of the acoustic wavelength and can reach atomic scale on flat samples. The ultrasonic vibrations of the AFM cantilever are examined as well as the nonlinear interaction between the AFM tip and the sample surface. An ultrasonic image taken with the new technique is shown

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1994 Proceedings of IEEE Ultrasonics Symposium

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