一种MEMS三维力传感器的振动特性

2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems Pub Date : 2011-04-18 DOI:10.1109/ESIME.2011.5765769

M. Erinc, H. van de Wiel, R. Werkhoven, A. Pongrácz, G. Battistig, H. Fischer

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引用次数: 1

摘要

汽车应用中的MEMS器件和传感器在使用寿命期间暴露在振动中。这些振动会对设备的精度和可靠性产生深远的影响。在本研究中，分析了一种用于汽车轮胎纵向和横向力测量的三维力传感器。该研究包括两个部分:首先，进行数值分析以确定设备的本征频率，并进行应力应变分析以确定传感器损坏前的允许位移。其次，通过激振器实验，评估了本征频率和机械疲劳抗力。此外，在测试电路上进行道路测试，以确定力传感器在实际汽车负载条件下连接到轮辋时的稳健性。

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Vibration characterization of a MEMS 3D force sensor

MEMS devices and sensors in automotive applications are exposed to vibrations during service life. These vibrations can have a profound effect on the accuracy and reliability of the device. In this study a 3D force sensor, to be used in an automotive tire for the measurement of longitudinal and lateral forces is analysed. The study compromises two parts: First, a numerical analysis is performed to determine Eigen frequencies of the device and a stress strain analysis to determine allowable displacements before the sensor is damaged. Next, Eigen frequencies and mechanical fatigue resistance is evaluated by means of vibration exciter experiments. Additionally, a road test is performed on a test circuit to determine the robustness of the force sensor under actual automotive load conditions while attached to the rims of the wheels.

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来源期刊

2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems

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