干涉法测量球面和非球面透镜数据的子孔径拼接

M. Stašík
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引用次数: 2

摘要

为了利用光干涉技术以足够的精度测量光学透镜表面形状,通常需要将区域划分为子孔径,然后分别捕获每个扇区。当获得数据时,有必要将元素合并在一起以进行进一步分析。本文主要研究球面光学透镜和非球面光学透镜的子孔径拼接问题。本文的主要内容是对拼接过程的描述和过程中的故障排除。例如,本文描述了如何补偿子孔径倾斜以及如何求解子孔径旋转。本文的另一个主题是处理拼接过程中的最终调整。文中对所使用的算法进行了描述。例如,本文给出了子孔径中心查找算法和重叠偏差评估算法。本文中非常有用的部分是对所使用的计算复杂度优化方法的描述。最后给出了实际测量和处理数据。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Sub-aperture stitching for data measured on spherical and aspherical lenses using interferometry
In order to measure an optical lens surface shape using optical interference with sufficient accuracy, it is usually necessary divide area into sub-apertures and then captures each sector separately. When the data are acquired, it is necessary to merge elements together for further analysis. This paper is primary about stitching sub-apertures on spherical and aspherical optical lens. The main content of this paper is mostly the description of a stitching procedure and troubleshooting during process. The paper for example contains a description how sub-apertures tilt was compensated and how sub-apertures rotation was solved. Another topic in this paper is dealing with final adjustment during stitching. The paper contains description for used algorithms. For example an algorithm for finding a sub-aperture centre and algorithm for overlap deviation evaluation are included in this paper. Very useful part in this paper is the description of used computational complexity optimisation methods. And finally real measured and processed data are presented.
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