脉冲激光沉积制备ZnGeAs2薄膜的表征

Z. Z. Tang, Lei Zhang, Rakesh Singh, D. Wright, T. Peshek, T. Gessert, T. Coutts, M. Schilfgaarde, Nathan Newman
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引用次数: 2

摘要

我们用脉冲激光沉积技术表征了在多种生长条件下生产的黄铜矿ZnGeAs2薄膜的性质。通过使用富锌靶材,可以在315℃的衬底温度下制备化学计量膜;以上为Zn和As缺乏症。光学吸收测量表明,ZnGeAs2薄膜的带隙是直接的,值为1.15 eV。热探针表明,沉积薄膜和退火薄膜均为p型。霍尔测量证实了这一点,并表明在600°C退火样品中载流子迁移率μp大于50 cm2/V·sec。通道卢瑟福后向散射光谱(RBS)表明,在450°C退火后获得了结构最佳的薄膜,通道产率为50%。我们的研究结果,结合观察到的成分是丰富的元素,表明ZnGeAs2是光伏应用的理想候选者。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Characterization of ZnGeAs2 thin films produced by pulsed laser deposition
We have characterized the properties of chalcopyrite ZnGeAs2 thin films produced over a wide range of growth conditions using pulsed laser deposition. By using a Zn-enriched target, stoichiometric films could be produced up to a substrate temperature of 315° C; above which the films were Zn and As deficient. Optical absorption measurements indicate that bandgap of the ZnGeAs2 thin films is direct with a value of ∼1.15 eV. Hot point probe indicate that the as-deposited and annealed thin films are both p-type. Hall measurements confirm this and also indicate that the carrier mobility, μp, is over 50 cm2/V·sec in the 600° C annealed samples. Channeling Rutherford Backscattering Spectroscopy (RBS) indicates that the structurally best films are achieved after 450 °C annealing with a channeling yield, ?min, of 50%. Our results, in combination with the observation that the constituents are abundant elements, suggest that ZnGeAs2 is an ideal candidate for photovoltaic applications.
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