{"title":"非线性反馈控制提高微机械静电并联板作动器的稳定性","authors":"Chong Li, R. Dean, G. Flowers, J. Hung","doi":"10.14355/IJAPE.2014.0301.10","DOIUrl":null,"url":null,"abstract":"MEMS parallel plate actuators on elastic suspensions are open loop stable over one third of their rest gap distance. To increase the range of stable motion, a nonlinear feedback controller is proposed in this paper. Verification and error analysis are performed using MATLAB Simulink.","PeriodicalId":270763,"journal":{"name":"International Journal of Automation and Power Engineering","volume":"56 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Nonlinear Feedback Control to Enhance Stable Performance of Micromachined Electrostatic Parallel Plate Actuators\",\"authors\":\"Chong Li, R. Dean, G. Flowers, J. Hung\",\"doi\":\"10.14355/IJAPE.2014.0301.10\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"MEMS parallel plate actuators on elastic suspensions are open loop stable over one third of their rest gap distance. To increase the range of stable motion, a nonlinear feedback controller is proposed in this paper. Verification and error analysis are performed using MATLAB Simulink.\",\"PeriodicalId\":270763,\"journal\":{\"name\":\"International Journal of Automation and Power Engineering\",\"volume\":\"56 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Journal of Automation and Power Engineering\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.14355/IJAPE.2014.0301.10\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Journal of Automation and Power Engineering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.14355/IJAPE.2014.0301.10","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Nonlinear Feedback Control to Enhance Stable Performance of Micromachined Electrostatic Parallel Plate Actuators
MEMS parallel plate actuators on elastic suspensions are open loop stable over one third of their rest gap distance. To increase the range of stable motion, a nonlinear feedback controller is proposed in this paper. Verification and error analysis are performed using MATLAB Simulink.
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