低损耗晶圆键合硅光子MEMS开关

2022 Optical Fiber Communications Conference and Exhibition (OFC) Pub Date : 2022-03-01 DOI:10.1364/ofc.2022.m2d.8

A. Honardoost, Johannes Henriksson, Kyungmok Kwon, Jianheng Luo, Ming C. Wu

{"title":"低损耗晶圆键合硅光子MEMS开关","authors":"A. Honardoost, Johannes Henriksson, Kyungmok Kwon, Jianheng Luo, Ming C. Wu","doi":"10.1364/ofc.2022.m2d.8","DOIUrl":null,"url":null,"abstract":"We report on $32\\times 32$ silicon photonic switches realized through wafer bonding. Broadband operation is demonstrated over 1260-1320 nm range. The maximum on-chip loss is measured to be 4 dB and the cross-talk is −80 dB. © 2022 The Author(s)","PeriodicalId":112434,"journal":{"name":"2022 Optical Fiber Communications Conference and Exhibition (OFC)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Low-Loss Wafer-Bonded Silicon Photonic MEMS Switches\",\"authors\":\"A. Honardoost, Johannes Henriksson, Kyungmok Kwon, Jianheng Luo, Ming C. Wu\",\"doi\":\"10.1364/ofc.2022.m2d.8\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We report on $32\\\\times 32$ silicon photonic switches realized through wafer bonding. Broadband operation is demonstrated over 1260-1320 nm range. The maximum on-chip loss is measured to be 4 dB and the cross-talk is −80 dB. © 2022 The Author(s)\",\"PeriodicalId\":112434,\"journal\":{\"name\":\"2022 Optical Fiber Communications Conference and Exhibition (OFC)\",\"volume\":\"24 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-03-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2022 Optical Fiber Communications Conference and Exhibition (OFC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/ofc.2022.m2d.8\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 Optical Fiber Communications Conference and Exhibition (OFC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/ofc.2022.m2d.8","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

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Low-Loss Wafer-Bonded Silicon Photonic MEMS Switches

We report on $32\times 32$ silicon photonic switches realized through wafer bonding. Broadband operation is demonstrated over 1260-1320 nm range. The maximum on-chip loss is measured to be 4 dB and the cross-talk is −80 dB. © 2022 The Author(s)

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2022 Optical Fiber Communications Conference and Exhibition (OFC)

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