高阻硅衬底上AlGaN/GaN hemt的微波噪声特性

Z.H. Liu, S. Arulkumaran, G. Ng, W. Cheong, R. Zeng, J. Bu, H. Wang, K. Radhakrishnan, C.H. Tan
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引用次数: 2

摘要

在高阻硅衬底上成功制备了栅极长度分别为0.8-/spl mu/m和0.3 /spl mu/m的AlGaN/GaN高电子迁移率晶体管。对于0.8-/spl mu/m和0.3-/spl mu/m门长器件,截止频率f/sub / T/分别为7 GHz和22 GHz,最大振荡频率f/sub / max/分别为23 GHz和40 GHz。在0.3-/spl mu/m栅极长度器件中,在10 GHz频率下,最小噪声系数(NF/sub min/)为2.0 dB,相关增益(G/sub ass/)为10.3 dB。这显示了AlGaN/GaN hemt在高电阻率Si上用于低成本低噪声放大器的巨大潜力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Microwave noise characteristics of AlGaN/GaN HEMTs on high-resistivity silicon substrate
AlGaN/GaN high-electron-mobility-transistors (HEMTs) with 0.8-/spl mu/m- and 0.3 /spl mu/m-gate-length were successfully fabricated on high-resistivity (HR) silicon substrate. The cutoff frequency f/sub T/ values of 7 GHz, 22 GHz and maximum oscillation frequency f/sub max/ values of 23 GHz, 40 GHz were achieved for 0.8-/spl mu/m- and 0.3-/spl mu/m-gate-length device, respectively. A minimum noise figure (NF/sub min/) of 2.0 dB and an associate gain (G/sub ass/) of 10.3 dB were achieved at 10 GHz in 0.3-/spl mu/m-gate-length device. This shows the promising potential of AlGaN/GaN HEMTs on high-resistivity Si for cost effective low noise amplifiers.
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