用于微创手术的自组装MEMS力传感器的设计与仿真

2011 IEEE Sensors Applications Symposium Pub Date : 2011-03-28 DOI:10.1109/SAS.2011.5739819

H. Gutierrez-Candano, S. Camacho-Léon, G. Dieck-Assad, S. Martínez-Chapa

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引用次数: 0

摘要

本工作描述了一种集成力微传感器的设计和有限元模拟，该传感器引入了一种具有潜在应用于微创手术(MIS)的自组装触觉结构。该传感器被设计为与单片微加工工艺下的互补金属氧化物-半导体-微机电系统(CMOS-MEMS)技术兼容，并允许测量到微牛顿尺度的力。

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Design and simulation of a self-assembled MEMS force sensor for Minimally Invasive Surgery

This work describes the design and Finite Element Method (FEM) simulation of an integrated force microsensor which introduces a self-assembled tactile structure with potential application to Minimally Invasive Surgery (MIS). The sensor is designed to be compatible with Complementary Metal-Oxide-Semiconductor-Micro-Electro-Mechanical Systems (CMOS-MEMS) technology under monolithic microfabrication processes, and allows force measurements up to the micronewton scale.

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2011 IEEE Sensors Applications Symposium

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