{"title":"激光扫描仪用多层压电陶瓷作动器","authors":"Jaesung Song, In-Sung Kim, S. Jeong, Min-Soo Kim","doi":"10.1109/OMEMS.2010.5672151","DOIUrl":null,"url":null,"abstract":"This work studies the lead magnesium niobate-lead zirconium titanate (PMN-PZT) multilayer ceramic actuators (MLCA) for laser scanner applications. PMN-PZT MLCA was fabricated. 5×5×30 mm3 size MLCA was fabricated by conventional tape casting method. The displacement of the MLCA with 30 mm thickness was ∼30 μm at 150 V Tilt stage consisting of multilayer actuator and two hinge type lever mechanisms was investigated. Circular hinge type mechanism showed translation from linear motion to rotation motion along with stroke amplification. The hinge-based mechanical platform showed one-to-one linear translation with strain amplifier, which is suitable for high precision control system.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"17 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Multilayer piezoelectric ceramic actuator for laser scanner\",\"authors\":\"Jaesung Song, In-Sung Kim, S. Jeong, Min-Soo Kim\",\"doi\":\"10.1109/OMEMS.2010.5672151\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This work studies the lead magnesium niobate-lead zirconium titanate (PMN-PZT) multilayer ceramic actuators (MLCA) for laser scanner applications. PMN-PZT MLCA was fabricated. 5×5×30 mm3 size MLCA was fabricated by conventional tape casting method. The displacement of the MLCA with 30 mm thickness was ∼30 μm at 150 V Tilt stage consisting of multilayer actuator and two hinge type lever mechanisms was investigated. Circular hinge type mechanism showed translation from linear motion to rotation motion along with stroke amplification. The hinge-based mechanical platform showed one-to-one linear translation with strain amplifier, which is suitable for high precision control system.\",\"PeriodicalId\":421895,\"journal\":{\"name\":\"2010 International Conference on Optical MEMS and Nanophotonics\",\"volume\":\"17 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-12-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2010 International Conference on Optical MEMS and Nanophotonics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2010.5672151\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2010.5672151","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Multilayer piezoelectric ceramic actuator for laser scanner
This work studies the lead magnesium niobate-lead zirconium titanate (PMN-PZT) multilayer ceramic actuators (MLCA) for laser scanner applications. PMN-PZT MLCA was fabricated. 5×5×30 mm3 size MLCA was fabricated by conventional tape casting method. The displacement of the MLCA with 30 mm thickness was ∼30 μm at 150 V Tilt stage consisting of multilayer actuator and two hinge type lever mechanisms was investigated. Circular hinge type mechanism showed translation from linear motion to rotation motion along with stroke amplification. The hinge-based mechanical platform showed one-to-one linear translation with strain amplifier, which is suitable for high precision control system.
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