雾化器法沉积碘化铜(CuI)薄膜前驱体溶液浓度的影响

M. Amalina, M. Rusop
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引用次数: 1

摘要

本文主要研究了喷嘴雾化制备CuI薄膜时前驱体浓度的影响。将CuI粉末与50 ml乙腈作为溶剂混合,制备了CuI薄膜的宽带隙p型半导体(3.1eV)。CuI浓度在0.05M ~ 0.5M之间变化。以氩气为载气,恒流量10ml/min,持续5分钟进行CuI沉积。衬底温度固定在100℃。结果表明,CuI薄膜的性能与前驱体浓度密切相关。用FESEM对沉积工艺的表面形貌进行了表征,显示出均匀的薄膜。这些CuI薄膜的电阻率约为103Ω cm,吸收系数为106 m−1。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Effect of the precursor solution concentration of Copper (I) Iodide (CuI) thin film deposited by mister atomizer method
This research focuses on the effect of precursor concentration of CuI thin film deposited by mister atomizer. The wide band gap p-type semiconductor (3.1eV) of CuI thin film was prepared by mixing the CuI powder with 50 ml of acetonitrile as a solvent. The CuI concentration varies from 0.05M to 0.5M. The argon gas was used as a carrier gas with constant flow rate of 10ml/min for 5 minutes for the CuI deposition. The substrate temperature was fixed at 100°C. The result shows the CuI thin film properties strongly depends on its precursor concentration. The surface morphology characterized by FESEM shows a uniform thin film using this deposition technique. The resistivity of about 103Ω cm and absorption coefficient of 106 m−1 is observed in those CuI thin films.
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