W. Tian, Yuting Zhang, Mengjuan. Li, Zhongliang Xie, Wenhua Li
{"title":"5位螺旋分布射频MEMS移相器","authors":"W. Tian, Yuting Zhang, Mengjuan. Li, Zhongliang Xie, Wenhua Li","doi":"10.1109/NANO46743.2019.8993952","DOIUrl":null,"url":null,"abstract":"A new spiral distributed radio frequency micro-electromechanical system (RF MEMS) phase shifter which uses 31 MEMS switches to achieve 5-bit phase shifts is designed in this paper. The area of the phase shifter is 2.6×2.6 mm2. The simulation results of phase shift are 11.43°, 23.04°, 44.53°, 91.73° and 182.65° when the central operating frequency is 40 GHz. The deviations of the design target are 0.18°, 0.54°, 0.47°, 1.73° and 2.65°, respectively. Insertion loss and return loss are -15.1092 dB/-8.9120 dB, -14.2271 dB/-9.9053 dB, -15.1092 dB/-8.9120 dB, -13.2439 dB/-11.6679 dB and -16.3046 dB/-10.2057dB, respectively. The simulation results and phase shift accuracy of the 31 phase shifts of RF MEMS phase shifter are given, and the deviation of the design target is within 3.72°. It realizes the requirements of RF MEMS phased array system. This phase shifter has the advantages of high frequency, small size, high precision, low loss and low cost.","PeriodicalId":365399,"journal":{"name":"2019 IEEE 19th International Conference on Nanotechnology (IEEE-NANO)","volume":"35 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"5-Bit Spiral Distributed RF MEMS Phase Shifter\",\"authors\":\"W. Tian, Yuting Zhang, Mengjuan. Li, Zhongliang Xie, Wenhua Li\",\"doi\":\"10.1109/NANO46743.2019.8993952\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A new spiral distributed radio frequency micro-electromechanical system (RF MEMS) phase shifter which uses 31 MEMS switches to achieve 5-bit phase shifts is designed in this paper. The area of the phase shifter is 2.6×2.6 mm2. The simulation results of phase shift are 11.43°, 23.04°, 44.53°, 91.73° and 182.65° when the central operating frequency is 40 GHz. The deviations of the design target are 0.18°, 0.54°, 0.47°, 1.73° and 2.65°, respectively. Insertion loss and return loss are -15.1092 dB/-8.9120 dB, -14.2271 dB/-9.9053 dB, -15.1092 dB/-8.9120 dB, -13.2439 dB/-11.6679 dB and -16.3046 dB/-10.2057dB, respectively. The simulation results and phase shift accuracy of the 31 phase shifts of RF MEMS phase shifter are given, and the deviation of the design target is within 3.72°. It realizes the requirements of RF MEMS phased array system. This phase shifter has the advantages of high frequency, small size, high precision, low loss and low cost.\",\"PeriodicalId\":365399,\"journal\":{\"name\":\"2019 IEEE 19th International Conference on Nanotechnology (IEEE-NANO)\",\"volume\":\"35 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 IEEE 19th International Conference on Nanotechnology (IEEE-NANO)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NANO46743.2019.8993952\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 IEEE 19th International Conference on Nanotechnology (IEEE-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NANO46743.2019.8993952","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A new spiral distributed radio frequency micro-electromechanical system (RF MEMS) phase shifter which uses 31 MEMS switches to achieve 5-bit phase shifts is designed in this paper. The area of the phase shifter is 2.6×2.6 mm2. The simulation results of phase shift are 11.43°, 23.04°, 44.53°, 91.73° and 182.65° when the central operating frequency is 40 GHz. The deviations of the design target are 0.18°, 0.54°, 0.47°, 1.73° and 2.65°, respectively. Insertion loss and return loss are -15.1092 dB/-8.9120 dB, -14.2271 dB/-9.9053 dB, -15.1092 dB/-8.9120 dB, -13.2439 dB/-11.6679 dB and -16.3046 dB/-10.2057dB, respectively. The simulation results and phase shift accuracy of the 31 phase shifts of RF MEMS phase shifter are given, and the deviation of the design target is within 3.72°. It realizes the requirements of RF MEMS phased array system. This phase shifter has the advantages of high frequency, small size, high precision, low loss and low cost.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
