非接触态微波探针电介质成像及其频率依赖性

H. Kakemoto, Jianyong Li, T. Hoshina, T. Tsurumi
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引用次数: 0

摘要

利用变频微波显微镜对介质的介电常数分布进行了研究。利用多层陶瓷电容器在最小强度点处的微波反射强度估算了其介电常数和介电损耗。得到了多层陶瓷电容器截面的二维介电常数图像。实验得到的空间分辨率约为1¿m。多层陶瓷电容器的介电常数和介电损耗与频率的关系与射频阻抗分析仪测得的低频介电谱一致。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Dielectric imaging and its frequency dependence of dielectric device using non-contact state microwave probe
The frequency variable microwave microscope was developed to evaluate the dielectric permittivity distribution for dielectrics. The dielectric permittivity and dielectric loss for multi-layer ceramics capacitor were estimated from their microwave reflection intensities at the minimum intensity points. The two dimensional dielectric permittivity image for the cross section of multi - layer ceramic capacitor was obtained clearly. The spatial resolution was attained to be about 1¿m experimentally. The measured frequency dependence of dielectric permittivity and dielectric loss for multi - layer ceramics capacitor were accordance with the low frequency dielectric spectra measured by a RF impedance analyzer.
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