Al/ZnO/Si单端口SAW谐振滤波器的设计

Proceedings of the Eighth International Symposium on Signal Processing and Its Applications, 2005. Pub Date : 2005-08-28 DOI:10.1109/ISSPA.2005.1580222

E. Ntagwirumugara, T. Gryba, J. Lefebvre

{"title":"Al/ZnO/Si单端口SAW谐振滤波器的设计","authors":"E. Ntagwirumugara, T. Gryba, J. Lefebvre","doi":"10.1109/ISSPA.2005.1580222","DOIUrl":null,"url":null,"abstract":"In this paper, we present an analysis and real isation of a ladder-type SAW filter composed of six resonators on the same port. The filter will be developed on a structure with three layers of a ZnO film and aluminium (AI) electrodes on a silicon (Si) substrate with TilAu for metallization in the 925-960MHz frequency band range. Up to now, RF front-end and interstage SAW filters for mobile communication are mainly fabricated on LiNb03 and LiTa03 substrates. A monolithic integration of these filters on semiconductor substrates is highly desirable to miniaturize the outer dimensions of the cellular phones. For analysis, we used the coupling-of-mode (COM) theory for analysing SAW periodic structures such as reflectors and interdigital transducers which has been used by the SAW industry as the standard modelling tool and we found the corresponding insertion loss for our resonator is very small, which will be very helpful in manufacturing corresponding SAW resonator filters.","PeriodicalId":385337,"journal":{"name":"Proceedings of the Eighth International Symposium on Signal Processing and Its Applications, 2005.","volume":"68 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-08-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Design of Al/ZnO/Si one-port SAW resonator filter\",\"authors\":\"E. Ntagwirumugara, T. Gryba, J. Lefebvre\",\"doi\":\"10.1109/ISSPA.2005.1580222\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, we present an analysis and real isation of a ladder-type SAW filter composed of six resonators on the same port. The filter will be developed on a structure with three layers of a ZnO film and aluminium (AI) electrodes on a silicon (Si) substrate with TilAu for metallization in the 925-960MHz frequency band range. Up to now, RF front-end and interstage SAW filters for mobile communication are mainly fabricated on LiNb03 and LiTa03 substrates. A monolithic integration of these filters on semiconductor substrates is highly desirable to miniaturize the outer dimensions of the cellular phones. For analysis, we used the coupling-of-mode (COM) theory for analysing SAW periodic structures such as reflectors and interdigital transducers which has been used by the SAW industry as the standard modelling tool and we found the corresponding insertion loss for our resonator is very small, which will be very helpful in manufacturing corresponding SAW resonator filters.\",\"PeriodicalId\":385337,\"journal\":{\"name\":\"Proceedings of the Eighth International Symposium on Signal Processing and Its Applications, 2005.\",\"volume\":\"68 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-08-28\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the Eighth International Symposium on Signal Processing and Its Applications, 2005.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISSPA.2005.1580222\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the Eighth International Symposium on Signal Processing and Its Applications, 2005.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSPA.2005.1580222","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

在本文中，我们提出了一个由六个谐振器组成的梯形声表面波滤波器的分析和实现。该滤波器将在三层ZnO薄膜和硅(Si)衬底上的铝(AI)电极的结构上开发，并在925-960MHz频段范围内使用TilAu进行金属化。目前，用于移动通信的射频前端和级间SAW滤波器主要采用LiNb03和LiTa03基片。这些滤波器在半导体基板上的单片集成是非常理想的，以使蜂窝电话的外部尺寸小型化。为了进行分析，我们使用模式耦合(COM)理论来分析SAW周期结构，如反射器和数字间换能器，这已经被SAW行业用作标准建模工具，我们发现我们的谐振器相应的插入损耗非常小，这将非常有助于制造相应的SAW谐振器滤波器。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Design of Al/ZnO/Si one-port SAW resonator filter

In this paper, we present an analysis and real isation of a ladder-type SAW filter composed of six resonators on the same port. The filter will be developed on a structure with three layers of a ZnO film and aluminium (AI) electrodes on a silicon (Si) substrate with TilAu for metallization in the 925-960MHz frequency band range. Up to now, RF front-end and interstage SAW filters for mobile communication are mainly fabricated on LiNb03 and LiTa03 substrates. A monolithic integration of these filters on semiconductor substrates is highly desirable to miniaturize the outer dimensions of the cellular phones. For analysis, we used the coupling-of-mode (COM) theory for analysing SAW periodic structures such as reflectors and interdigital transducers which has been used by the SAW industry as the standard modelling tool and we found the corresponding insertion loss for our resonator is very small, which will be very helpful in manufacturing corresponding SAW resonator filters.

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Proceedings of the Eighth International Symposium on Signal Processing and Its Applications, 2005.

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