MBE技术与半导体激光材料的发展

Thin Film Physics and Applications Pub Date : 1998-02-20 DOI:10.1117/12.300715

Guo-Jun Liu, Qianyong Zhang, Han Yang, Xingde Zhang, Xueqian Li, Y. Qu, Xiaowei Song, Xiao-hua Wang

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引用次数: 0

摘要

本文综述了新购VG V80H MBE系统的技术特点和性能。本文还介绍了我们在该系统上生长薄膜半导体激光材料的研究工作，并对束流稳定性和生长均匀性等问题进行了讨论。

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MBE technology and semiconductor laser material growth

This paper summarizes the technical characteristics and performance of our newly purchased VG V80H MBE system. Our research work on thin film semiconductor laser materials growth on this system has also been presented here, with some discussion on beam flux stability and growth uniformity et al.

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来源期刊

Thin Film Physics and Applications

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