Micromachined Optical Components Integrated With Photodiode

Si micromachining gives new optical component intrgiated with the semiconductor drvit c. The optical component including the photodetector is i d d enabling the beam iritensity rrioriitor without additional elements. For the function of some optical components (e.g.. grating, pinhole), t he mechanical struct lire is impoi tant. Si m i c lomachining technology c dn offm t he accurate mechanical structure. In this study. we have fabricated the I iarisparent posit ion sensot. and the pinhole integrated with the photodiode