使用集成薄膜加热器和传感器在单片芯片上单独控制多个awg

OFC/NFOEC Technical Digest. Optical Fiber Communication Conference, 2005. Pub Date : 2005-03-06 DOI:10.1109/OFC.2005.192616

M. Yan, C. Ho, X. Hao, W. Li, Y. Tarter

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引用次数: 0

摘要

本文演示了利用集成薄膜加热器和传感器在单片芯片上实现多阵列波导光栅(awg)的局部和独立温度控制，并将其应用于集成PLC设备。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Individual control of multiple AWGs on a monolithic chip using integrated thin film heaters and sensors

Localized and independent temperature control of multiple arrayed waveguide gratings (AWGs) on a monolithic chip using integrated thin film heaters and sensors is demonstrated and applied to integrated PLC devices.

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OFC/NFOEC Technical Digest. Optical Fiber Communication Conference, 2005.

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