基于结构不确定性方法的RTP系统鲁棒控制器设计

SICE '99. Proceedings of the 38th SICE Annual Conference. International Session Papers (IEEE Cat. No.99TH8456) Pub Date : 1999-07-28 DOI:10.1109/SICE.1999.788672

Sang Kyung Lee, Jong Hae Kim, Dochang Oh, H. Park

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引用次数: 0

摘要

本文提出了一种基于结构不确定性的快速热加工系统鲁棒控制器设计方法。采用加权混合灵敏度函数，解决了系统在扰动和温度变化下的鲁棒稳定性问题，并采用抗结构不确定性的曲线拟合方法设计了a /spl mu/控制器。最后给出了仿真结果，验证了所提方法的有效性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Robust controller design for RTP system using structured uncertainty approach

In this paper, we propose an robust controller design of rapid thermal processing (RTP) system using the structured uncertainty approach. Using the weighted mixed sensitivity function, we solve the robust stability problem against disturbance and temperature variation, and design a /spl mu/ controller using the curve fitting method against structured uncertainty. Finally, the simulation results are proposed to show the validity of the proposed method.

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SICE '99. Proceedings of the 38th SICE Annual Conference. International Session Papers (IEEE Cat. No.99TH8456)

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