{"title":"在ADAPT抛光中出现的进给方向中频误差","authors":"S. Killinger, J. Liebl, R. Rascher","doi":"10.1117/12.2528114","DOIUrl":null,"url":null,"abstract":"Previous work shows the effectiveness of computer controlled polishing (CCP) with the ADAPT tool by Satisloh for correcting form errors in optics manufacturing. This method however has a risk of producing residual errors in the range of mid spatial frequency errors (MSFE). In order to prevent these errors the residual in feed direction is investigated as well as the behavior at different parameters.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"93 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Mid-spatial frequency errors in feed direction occurring in ADAPT polishing\",\"authors\":\"S. Killinger, J. Liebl, R. Rascher\",\"doi\":\"10.1117/12.2528114\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Previous work shows the effectiveness of computer controlled polishing (CCP) with the ADAPT tool by Satisloh for correcting form errors in optics manufacturing. This method however has a risk of producing residual errors in the range of mid spatial frequency errors (MSFE). In order to prevent these errors the residual in feed direction is investigated as well as the behavior at different parameters.\",\"PeriodicalId\":422212,\"journal\":{\"name\":\"Precision Optics Manufacturing\",\"volume\":\"93 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-06-28\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Precision Optics Manufacturing\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2528114\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Precision Optics Manufacturing","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2528114","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Mid-spatial frequency errors in feed direction occurring in ADAPT polishing
Previous work shows the effectiveness of computer controlled polishing (CCP) with the ADAPT tool by Satisloh for correcting form errors in optics manufacturing. This method however has a risk of producing residual errors in the range of mid spatial frequency errors (MSFE). In order to prevent these errors the residual in feed direction is investigated as well as the behavior at different parameters.
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