用于IC芯片冷却的微机械e-jet

2002 IEEE International Solid-State Circuits Conference. Digest of Technical Papers (Cat. No.02CH37315) Pub Date : 2002-08-07 DOI:10.1109/ISSCC.2002.992257

A. Tsung-Kuan, Chou, Khalil Najafi, M. Muller, L. P. Bernal, P. Washabaugh, Babak A. Parviz

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引用次数: 4

摘要

作者提出了一种微机械声喷射器(MACE)芯片，该芯片包含静电驱动的亥姆霍兹谐振器，可以产生小的空气射流。一个1.6×1.6厘米/sup 2/的原型包含25个e-喷气机，测量速度为1米/秒。结果表明，位于100°C表面上方约1 cm的15个射流装置的耗散>6W/m/sup 2/ k。未来的一代正在设计更高的射流速度。

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Micromachined e-jet for IC chip cooling

The authors present a micromachined acoustic ejector (MACE) chip which contains electrostatically-driven Helmholtz resonators that generate small air jets. A 1.6×1.6 cm/sup 2/ prototype contains 25 e-jets with 1 m/s measured velocity. Results show that a 15-jet device located ∼1 cm above a 100°C surface dissipates >6W/m/sup 2/ K. Future generations are being designed with higher jet velocity.

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2002 IEEE International Solid-State Circuits Conference. Digest of Technical Papers (Cat. No.02CH37315)

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