D. I. Panov, Z. Xi, V. Spiridonov, L. Azina, R. Nuryev, N.D. Prasolov, L. A. Sokura, D. Bauman, V. Bougrov
{"title":"β-Ga2O3薄膜的喷雾热解制备及质量研究","authors":"D. I. Panov, Z. Xi, V. Spiridonov, L. Azina, R. Nuryev, N.D. Prasolov, L. A. Sokura, D. Bauman, V. Bougrov","doi":"10.17586/2687-0568-2021-3-4-7-12","DOIUrl":null,"url":null,"abstract":"In this paper, we report on the successful fabrication of β-Ga2O3 thin films by spray-pyrolysis technique. We provide the data on the dependence of the quality of the β-Ga2O3 films on the regimes and parameters of fabrication. Scanning electron microscopy, atomic force microscopy and optical spectroscopy are used to analyze film properties. X-ray diffraction phase analysis of the films after heat treatment at 900°C confirms the formation of β-Ga2O3 crystallites.","PeriodicalId":332408,"journal":{"name":"Reviews on Advanced Materials and Technologies","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Spray-Pyrolysis Fabrication and Quality Study of β-Ga2O3 Thin Films\",\"authors\":\"D. I. Panov, Z. Xi, V. Spiridonov, L. Azina, R. Nuryev, N.D. Prasolov, L. A. Sokura, D. Bauman, V. Bougrov\",\"doi\":\"10.17586/2687-0568-2021-3-4-7-12\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, we report on the successful fabrication of β-Ga2O3 thin films by spray-pyrolysis technique. We provide the data on the dependence of the quality of the β-Ga2O3 films on the regimes and parameters of fabrication. Scanning electron microscopy, atomic force microscopy and optical spectroscopy are used to analyze film properties. X-ray diffraction phase analysis of the films after heat treatment at 900°C confirms the formation of β-Ga2O3 crystallites.\",\"PeriodicalId\":332408,\"journal\":{\"name\":\"Reviews on Advanced Materials and Technologies\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Reviews on Advanced Materials and Technologies\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.17586/2687-0568-2021-3-4-7-12\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Reviews on Advanced Materials and Technologies","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.17586/2687-0568-2021-3-4-7-12","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Spray-Pyrolysis Fabrication and Quality Study of β-Ga2O3 Thin Films
In this paper, we report on the successful fabrication of β-Ga2O3 thin films by spray-pyrolysis technique. We provide the data on the dependence of the quality of the β-Ga2O3 films on the regimes and parameters of fabrication. Scanning electron microscopy, atomic force microscopy and optical spectroscopy are used to analyze film properties. X-ray diffraction phase analysis of the films after heat treatment at 900°C confirms the formation of β-Ga2O3 crystallites.