介面化学与微装置:化学微感测器的潜力与挑战

The Fourth International Conference on Advanced Semiconductor Devices and Microsystem Pub Date : 2002-12-16 DOI:10.1109/ASDAM.2002.1088531

B. Mizaikoff, C. Kranz

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引用次数: 1

摘要

微纳米技术和纳米技术的最新进展决定了化学传感器技术领域的当前趋势，使器件组件和整个传感系统的微纳米制造成为可能。然而，并不是所有的化学传感系统的性能都必然随着物理尺寸的减小而提高。讨论了在现实环境中应用化学传感器的挑战，并推导了将化学传感系统缩小到微纳米尺度的隐含后果。对小型化化学传感器技术的一般方面与选定的实例进行了对比，阐明了中红外光学传感器和扫描探针尖端集成电化学传感装置领域的发展趋势。

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Interfacing chemistry with microdevices: Potential and challenges of chemical microsensors

Recent advances in micro- and nanotechnology determine current trends in the field of chemical sensor technology enabling micro- and nanofabrication of device components and entire sensing systems. However, not all properties of chemical sensing systems necessarily improve with decreasing physical dimensions. Challenges of applying chemical sensors in a real-world environment are discussed and implicit consequences for scaling down chemical sensing systems to the micro- and nanoscale are derived. General aspects of miniaturized chemical sensor technology is contrasted with selected examples elucidating trends in the field of mid-infrared optical sensors and scanning probe tip integrated electrochemical sensing devices.

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The Fourth International Conference on Advanced Semiconductor Devices and Microsystem

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