在新的相变介质中记录0.1微米的最小标记尺寸

2000 Optical Data Storage. Conference Digest (Cat. No.00TH8491) Pub Date : 2000-05-14 DOI:10.1117/12.399336

H. Miura, S. Fujita, K. Yokomori

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引用次数: 3

摘要

为了估计相变标记的最小尺寸，使用远场光学拾取器在表面记录盘上记录了约0.1 /spl mu/m的标记。研究了这些标记的形状和均匀性。用扫描电镜研究了相变标记的形状。在采用AgInSbTe相变材料的表面记录盘上，切向标记尺寸可减小到0.1 μ / μ m左右。随着尺寸的缩小，标记形状的波动很难被识别。

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Recording of 0.1 micron minimum mark size in a new phase change media

Inorder to estimate a minimum size for phase-change marks, marks around 0.1 /spl mu/m were recorded on surface recording discs using a far field optical pickup. The shape and uniformity of these marks investigated. The shapes of phase-change marks were investigated by SEM. On the surface recording disc with AgInSbTe phase-change material, the mark size could be reduced to around O.l /spl mu/m in the tangential direction. The fluctuation in mark shape with scaling down of size was hardly recognized.

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2000 Optical Data Storage. Conference Digest (Cat. No.00TH8491)

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