基于ANSYS软件的MEMS气体传感器温度场有限元仿真分析

2021 3rd International Conference on Artificial Intelligence and Advanced Manufacture (AIAM) Pub Date : 2021-10-01 DOI:10.1109/AIAM54119.2021.00099

Xiaojuan Li, Yidong Yuan, Yabing Li, Jinwen Liu, Siqi Li, Yu Liu, Yan Cheng

{"title":"基于ANSYS软件的MEMS气体传感器温度场有限元仿真分析","authors":"Xiaojuan Li, Yidong Yuan, Yabing Li, Jinwen Liu, Siqi Li, Yu Liu, Yan Cheng","doi":"10.1109/AIAM54119.2021.00099","DOIUrl":null,"url":null,"abstract":"MEMS gas sensor reflects the concentration of the target gas in the air through the change of the resistance of the surface sensitiuses. ANSYS software is used to simulate and analyze the structure of the traditional MEMS gas sensor in this paper. By setting different corrosion areas of Si backing, electrode pattern sizes, and the distance between pad pins and lines, the temperature field distribution diagram is simulated and analyzed, which provides a reference basis for the structural design and thermal design of MEMS gas sensors.","PeriodicalId":227320,"journal":{"name":"2021 3rd International Conference on Artificial Intelligence and Advanced Manufacture (AIAM)","volume":"20 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Finite Element Simulation Analysis of Temperature Field of MEMS Gas Sensor Based on ANSYS Software\",\"authors\":\"Xiaojuan Li, Yidong Yuan, Yabing Li, Jinwen Liu, Siqi Li, Yu Liu, Yan Cheng\",\"doi\":\"10.1109/AIAM54119.2021.00099\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"MEMS gas sensor reflects the concentration of the target gas in the air through the change of the resistance of the surface sensitiuses. ANSYS software is used to simulate and analyze the structure of the traditional MEMS gas sensor in this paper. By setting different corrosion areas of Si backing, electrode pattern sizes, and the distance between pad pins and lines, the temperature field distribution diagram is simulated and analyzed, which provides a reference basis for the structural design and thermal design of MEMS gas sensors.\",\"PeriodicalId\":227320,\"journal\":{\"name\":\"2021 3rd International Conference on Artificial Intelligence and Advanced Manufacture (AIAM)\",\"volume\":\"20 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2021 3rd International Conference on Artificial Intelligence and Advanced Manufacture (AIAM)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/AIAM54119.2021.00099\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 3rd International Conference on Artificial Intelligence and Advanced Manufacture (AIAM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/AIAM54119.2021.00099","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

MEMS气体传感器是通过表面敏器电阻的变化来反映空气中目标气体的浓度。本文利用ANSYS软件对传统MEMS气体传感器的结构进行了仿真分析。通过设置不同的Si衬底腐蚀区域、电极图案尺寸、焊脚与线之间的距离，模拟分析温度场分布图，为MEMS气体传感器的结构设计和热设计提供参考依据。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Finite Element Simulation Analysis of Temperature Field of MEMS Gas Sensor Based on ANSYS Software

MEMS gas sensor reflects the concentration of the target gas in the air through the change of the resistance of the surface sensitiuses. ANSYS software is used to simulate and analyze the structure of the traditional MEMS gas sensor in this paper. By setting different corrosion areas of Si backing, electrode pattern sizes, and the distance between pad pins and lines, the temperature field distribution diagram is simulated and analyzed, which provides a reference basis for the structural design and thermal design of MEMS gas sensors.

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来源期刊

2021 3rd International Conference on Artificial Intelligence and Advanced Manufacture (AIAM)

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