{"title":"基于倏逝场耦合的生物化学传感器集成光传感器平台","authors":"Hyungseok Pang, P. LiKamWa, H. Cho","doi":"10.1109/ICSENS.2007.355916","DOIUrl":null,"url":null,"abstract":"A photodetector integrated waveguide platform for diverse types of evanescent-wave sensor applications has been developed. Using this platform, surface plasmon resonance (SPR) detection has been demonstrated. The waveguide was made of SU-8 polymer as a guiding layer and siliconoxynitride (SiOXNy) as a cladding layer. The metal-semiconductor-metal (MSM) type photodetector coupled to the waveguide provides flexibility in design and fabrication compared to a pin (p-intrinsic-n) photodetector. We present a universal sensor architecture that can be used for evanescent-field based interrogation with (a) controllable refractive index and (b) integrated opto-electric signal conversion.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"69 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Integrated Optical Sensor Platform based on Evanescent Field Coupling for Biochemical Sensor Applications\",\"authors\":\"Hyungseok Pang, P. LiKamWa, H. Cho\",\"doi\":\"10.1109/ICSENS.2007.355916\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A photodetector integrated waveguide platform for diverse types of evanescent-wave sensor applications has been developed. Using this platform, surface plasmon resonance (SPR) detection has been demonstrated. The waveguide was made of SU-8 polymer as a guiding layer and siliconoxynitride (SiOXNy) as a cladding layer. The metal-semiconductor-metal (MSM) type photodetector coupled to the waveguide provides flexibility in design and fabrication compared to a pin (p-intrinsic-n) photodetector. We present a universal sensor architecture that can be used for evanescent-field based interrogation with (a) controllable refractive index and (b) integrated opto-electric signal conversion.\",\"PeriodicalId\":233838,\"journal\":{\"name\":\"2006 5th IEEE Conference on Sensors\",\"volume\":\"69 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2006 5th IEEE Conference on Sensors\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENS.2007.355916\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 5th IEEE Conference on Sensors","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2007.355916","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Integrated Optical Sensor Platform based on Evanescent Field Coupling for Biochemical Sensor Applications
A photodetector integrated waveguide platform for diverse types of evanescent-wave sensor applications has been developed. Using this platform, surface plasmon resonance (SPR) detection has been demonstrated. The waveguide was made of SU-8 polymer as a guiding layer and siliconoxynitride (SiOXNy) as a cladding layer. The metal-semiconductor-metal (MSM) type photodetector coupled to the waveguide provides flexibility in design and fabrication compared to a pin (p-intrinsic-n) photodetector. We present a universal sensor architecture that can be used for evanescent-field based interrogation with (a) controllable refractive index and (b) integrated opto-electric signal conversion.
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