低压无铁氧体电感耦合放电的电特性

Yuming Chen, Yang Liu
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引用次数: 0

摘要

研究了低压无铁氧体电感耦合放电的电学参数。在实验中,等离子体可以看作是空芯变压器的一匝二次负载。通过计算麦克斯韦方程,可以得到像部与实部的电导率之比σi/σr。通过等效电路的计算,可以得到其电特性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Electrical characteristics in a low pressure ferrite-free inductively coupled discharge
The electrical parameters of a low pressure ferrite-free inductively coupled discharge have been investigated. In the experiment plasma can be considered as a one-turn secondary load of an air-core transformer. The electrical conductivity ratio between the image part and the real part σi/σr can be obtained through calculating Maxwell equations. The electrical characteristics can be obtained by the calculation of the equivalent circuit.
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