Dielectric Properties of RF Sputered Bismuth Titanate Thin Films

S e v e r a l a t t e m p t s [S-101 have been made t o p r e p a r e s t o i c h i o m e t r i c Bi4Ti3OI2 f i l m s in o r d e r t o d u p l i c a t e i t s s i n g l e c r y s t a l p r o p e r t i e s . Var ious p r e p a r a t i o n t e c h n i q u e s , i n c l u d i n g RF s p u t t e r i n g . were used f o r t h e Bi4Ti3012 t h i n f i l m p repa ra t ion . In t h i s p a p e r we r e p o r t t h e p r e p a r a t i o n o f t h i n f i l m s of Bi4Ti3012 and t h e i r d i e l e c t r i c p r o p e r t i e s . Abs t roc t